Nanofabrication Facility
The Nanofabrication Facility provides a cleanroom that has a space of 450 m² with ISO 7 (class 10000), ISO 6 (class 1000) and ISO 5 (class 100) areas and is equipped with state-of-the-art technology.
The Nanofabrication Facility offers tools that support researchers and PhD students in their research. In addition, it develops, optimizes, and maintains micro- and nanofabrication processes.
For specific further facility details, please visit the Nanofabrication Facility web page:
nff.pages.ist.ac.at
On this site:
Services
Our Nanofabrication Facility provides …
- cleanroom equipped with the state-of-the-art technology for micro- and nanofabrication processing
- specialized staff who guarantee the availability of processing equipment and the development of new processing
- training and availability for all users
Description of ISTA Cleanrooms
The cleanroom is divided in two units located on the ground floor and in the basement of Lab and Office Building West (I21).
Ground floor
The cleanroom in the ground floor is 340 m². The main part of the cleanroom is allocated on the ground floor and is divided into following areas:
- Photo lithography (20 m²)
- Wet chemistry (25 m²)
- Deposition (24 m²)
- Dry etching (25 m²)
- Characterization (26 m²)
- PDMS fabrication (17 m²)
- Tools (18 m²)
- Clean room corridoor (57 m²)
- Grey area (130 m²)
Basement
The cleanroom in the basement is 70 m² (with potential extension up to 120 m²). It provides the best condition for low vibrational noise, electromagnetic noise and temperature stability. This unit is divided into the following areas:
- Electron beam lithography (21 m²)
- Scanning electron microscope (14 m²)
- Characterization 1 (10 m²)
- Characterization 2 (11 m²)
- Clean room corridor (20 m²)
- Grey area (25 m²)
Soft wall Cleanroom 1
The soft wall cleanroom 1 is located in the ground floor with 24 m² of soft wall cleanroom and a grey area of 16 m².
Soft wall Cleanroom 2
The Soft wall Cleanroom 2 is located in the ground floor with 6 m² of soft wall cleanroom and a grey area of 5 m².
Tiny Lab
There are additional rooms for characterization and bonding equipment in the 2nd floor (20 m²).
NFF Characterization Lab
The NFF Characterization Lab is located in the 3rd floor (24 m²).
Equipment
- E-Beam and Optical Lithography
- Thin Film Deposition
- Wet and Dry Etching
- Inspection and Characterization
- Microscopy and Nanomanipulation
- Back-End Processing
- Soft lithography
- Nano 3D Printer
Staff
Bruno Martins Magalhaes
Cleanroom Technology/Process Engineering
+43 2243 9000 2087
Rodolfo Previdi
Cleanroom Technology/Process Engineering
+43 2243 9000 2049
Evgeniia Volobueva
Cleanroom Technology/Process Engineering
+43 2243 9000 2197
Contact
Institute of Science and Technology Austria
c/o Nanofabrication Facility
Am Campus 1, A-3400 Klosterneuburg, Austria
Office: Lab and Office building West, ground floor
Scientific Head of Nanofabrication Facility:
Johannes Fink
Contact for facility questions: nff@ist.ac.at
Contact Manager:
